Practical precursor aspects for electron beam induced deposition
نویسندگان
چکیده
منابع مشابه
Electron-beam-induced deposition of platinum from a liquid precursor.
We demonstrate here the first focused electron-beam-induced deposition (EBID) of nanostructures using a liquid precursor. We have deposited sub-50 nm platinum (Pt) wires and dots from a dilute, aqueous solution of chloroplatinic acid. Existing EBID processes rely on the electron-beam stimulated decomposition of gaseous precursors; as a result, the deposits are highly contaminated (up to 75 at. ...
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ژورنال
عنوان ژورنال: Nanofabrication
سال: 2014
ISSN: 2299-680X
DOI: 10.2478/nanofab-2014-0007